Wafer-scale design of lightweight and transparent electronics that wraps around hairs

被引:282
作者
Salvatore, Giovanni A. [1 ]
Muenzenrieder, Niko [1 ]
Kinkeldei, Thomas [1 ]
Petti, Luisa [1 ]
Zysset, Christoph [1 ]
Strebel, Ivo [1 ]
Buethe, Lars [1 ]
Troester, Gerhard [1 ]
机构
[1] Swiss Fed Inst Technol, Elect Lab, CH-8092 Zurich, Switzerland
来源
NATURE COMMUNICATIONS | 2014年 / 5卷
关键词
THIN-FILM TRANSISTORS; HIGH-PERFORMANCE; SEMITRANSPARENT; ULTRATHIN; CIRCUITS;
D O I
10.1038/ncomms3982
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Electronics on very thin substrates have shown remarkable bendability, conformability and lightness, which are important attributes for biological tissues sensing, wearable or implantable devices. Here we propose a wafer-scale process scheme to realize ultra flexible, lightweight and transparent electronics on top of a 1-mu m thick parylene film that is released from the carrier substrate after the dissolution in water of a polyvinyl- alcohol layer. The thin substrate ensures extreme flexibility, which is demonstrated by transistors that continue to work when wrapped around human hairs. In parallel, the use of amorphous oxide semiconductor and high-K dielectric enables the realization of analogue amplifiers operating at 12V and above 1 MHz. Electronics can be transferred on any object, surface and on biological tissues like human skin and plant leaves. We foresee a potential application as smart contact lenses, covered with light, transparent and flexible devices, which could serve to monitor intraocular pressure for glaucoma disease.
引用
收藏
页数:8
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