Self organization phenomena of InGaAs/GaAs quantum dots grown by metalorganic chemical vapour deposition

被引:51
作者
Heinrichsdorff, F
Krost, A
Grundmann, M
Bimberg, D
Bertram, F
Christen, J
Kosogov, A
Werner, P
机构
[1] OTTO VON GUERICKE UNIV,D-39016 MAGDEBURG,GERMANY
[2] MAX PLANCK INST MICROSTRUCT PHYS,D-06120 HALLE,GERMANY
关键词
D O I
10.1016/S0022-0248(96)00614-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have systematically investigated the influence of MOCVD growth parameters on structural and optical properties of InxGa1-xAs/GaAs quantum dots (QDs) formed in the Stranski-Krastanow growth mode. The influence of growth interruption time, V/III ratio, In/Ga flux ratio and growth temperature was examined by photoluminescence (PL), transmission electron microscopy (TEM) and atomic force microscopy (AFM). For samples with high dot densities (up to 8 x 10(10) cm(-2)) the dots surprisingly show a preferential alignment along the [110] orientations differing from predictions of strain relaxation equilibrium theory and results for MBE grown InAs/GaAs dots. The square base shape of the quantum dots is oriented along (100) in agreement with MBE results and theoretical predictions.
引用
收藏
页码:568 / 573
页数:6
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