Self organization phenomena of InGaAs/GaAs quantum dots grown by metalorganic chemical vapour deposition

被引:51
作者
Heinrichsdorff, F
Krost, A
Grundmann, M
Bimberg, D
Bertram, F
Christen, J
Kosogov, A
Werner, P
机构
[1] OTTO VON GUERICKE UNIV,D-39016 MAGDEBURG,GERMANY
[2] MAX PLANCK INST MICROSTRUCT PHYS,D-06120 HALLE,GERMANY
关键词
D O I
10.1016/S0022-0248(96)00614-8
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
We have systematically investigated the influence of MOCVD growth parameters on structural and optical properties of InxGa1-xAs/GaAs quantum dots (QDs) formed in the Stranski-Krastanow growth mode. The influence of growth interruption time, V/III ratio, In/Ga flux ratio and growth temperature was examined by photoluminescence (PL), transmission electron microscopy (TEM) and atomic force microscopy (AFM). For samples with high dot densities (up to 8 x 10(10) cm(-2)) the dots surprisingly show a preferential alignment along the [110] orientations differing from predictions of strain relaxation equilibrium theory and results for MBE grown InAs/GaAs dots. The square base shape of the quantum dots is oriented along (100) in agreement with MBE results and theoretical predictions.
引用
收藏
页码:568 / 573
页数:6
相关论文
共 18 条
[11]   SURFACE SEGREGATION OF 3RD-COLUMN IN GROUP III-V ARSENIDE COMPOUNDS - TERNARY ALLOYS AND HETEROSTRUCTURES [J].
MOISON, JM ;
GUILLE, C ;
HOUZAY, F ;
BARTHE, F ;
VANROMPAY, M .
PHYSICAL REVIEW B, 1989, 40 (09) :6149-6162
[12]   SELF-ORGANIZED GROWTH OF REGULAR NANOMETER-SCALE INAS DOTS ON GAAS [J].
MOISON, JM ;
HOUZAY, F ;
BARTHE, F ;
LEPRINCE, L ;
ANDRE, E ;
VATEL, O .
APPLIED PHYSICS LETTERS, 1994, 64 (02) :196-198
[13]   SELF-FORMED IN0.5GA0.5AS QUANTUM DOTS ON GAAS SUBSTRATES EMITTING AT 1.3 MU-M [J].
MUKAI, K ;
OHTSUKA, N ;
SUGAWARA, M ;
YAMAZAKI, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1994, 33 (12A) :L1710-L1712
[14]   HIGHLY UNIFORM INGAAS/GAAS QUANTUM DOTS (SIMILAR-TO-15 NM) BY METALORGANIC CHEMICAL-VAPOR-DEPOSITION [J].
OSHINOWO, J ;
NISHIOKA, M ;
ISHIDA, S ;
ARAKAWA, Y .
APPLIED PHYSICS LETTERS, 1994, 65 (11) :1421-1423
[15]   STRUCTURAL CHARACTERIZATION OF (IN,GA)AS QUANTUM DOTS IN A GAAS MATRIX [J].
RUVIMOV, S ;
WERNER, P ;
SCHEERSCHMIDT, K ;
GOSELE, U ;
HEYDENREICH, J ;
RICHTER, U ;
LEDENTSOV, NN ;
GRUNDMANN, M ;
BIMBERG, D ;
USTINOV, VM ;
EGOROV, AY ;
KOPEV, PS ;
ALFEROV, ZI .
PHYSICAL REVIEW B, 1995, 51 (20) :14766-14769
[16]   Alignment of InP Stranski-Krastanow dots by growth on patterned GaAs/GaInP surfaces [J].
Seifert, W ;
Carlsson, N ;
Petersson, A ;
Wernersson, LE ;
Samuelson, L .
APPLIED PHYSICS LETTERS, 1996, 68 (12) :1684-1686
[17]  
SHEHUKIN VA, 1995, PHYS REV LETT, V75, P2968
[18]  
SHINOHARA M, 1994, J CRYST GROWTH, V145, P13