Ambipolar-to-unipolar conversion of carbon nanotube transistors by gate structure engineering

被引:105
作者
Lin, YM [1 ]
Appenzeller, J [1 ]
Avouris, P [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1021/nl049745j
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
The switching behavior of carbon nanotube field-effect transistors (CNFETs) can be improved by decreasing the gate oxide thickness. However, decreasing the oxide thickness also results in more pronounced ambipolar transistor characteristics and higher off-currents. To achieve high-performance unipolar CNFETs as required for CMOS logic gates, we have fabricated partially gated CNFETs with an asymmetric gate structure with respect to the source and drain electrodes. With our gate structure engineering concept, p-type CNFETs have been fabricated from an ambipolar CNFET. It is also found that fringing fields from source and drain are important in determining the CNFET behavior as the device size decreases.
引用
收藏
页码:947 / 950
页数:4
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