Fabrication of patterned media for high density magnetic storage

Arrays of discrete, lithographically patterned magnetic elements have been proposed as a new generation of ultrahigh density patterned magnetic storage media. Interferometric lithography has been used to make prototype arrays over large areas with periods of 100-200 nm. Arrays of magnetic pillars, pyramids, and dots have been made by electrodeposition, evaporation and liftoff, and etching processes, and the magnetic properties of the particles and their mutual interactions have been measured. (C) 1999 American Vacuum Society. [S0734-211X(99)11906-1].