Thermal properties of porous silicon layers

被引：20

作者：

Benedetto, G

Boarino, L

Brunetto, N

Rossi, A

Spagnolo, R

Amato, G

机构：

[1] Istituto Elettrotecnico Nazionale ‘Galileo Ferraris’, Torino, 10135

来源：

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES | 1997年 / 76卷 / 03期

关键词：

D O I：

10.1080/01418639708241101

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Porous silicon layers of different morphologies and porosities have been produced and characterized by means of a photoacoustic technique, showing in some cases a very low thermal conductivity with respect to crystalline bulk silicon. The results confirm other experimental evidence and suggest in particular strong similarities between highly porous silicon layers and silica aerogel systems.

引用

页码：383 / 393

页数：11

共 28 条

[1] ANALYTICAL OPTOACOUSTIC SPECTROMETRY .3. OPTOACOUSTIC EFFECT AND THERMAL-DIFFUSIVITY [J].