Self-assembling GaAs mirror with electrostatic actuation using micro-origami

被引：10

作者：

Fleischmann, T ^{[1
]}

Kubota, K ^{[1
]}

Vaccaro, PO ^{[1
]}

Wang, TS ^{[1
]}

Saravanan, S ^{[1
]}

Saito, N ^{[1
]}

机构：

[1] ATR Wave Engn Labs, Kyoto 6190288, Japan

来源：

PHYSICA E-LOW-DIMENSIONAL SYSTEMS & NANOSTRUCTURES | 2004年 / 24卷 / 1-2期

关键词：

self-assembly; GaAs; micro-origami; MEMS; actuation;

D O I：

10.1016/j.physe.2004.04.028

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The fabrication of GaAs micro-mirrors with electrostatic actuation are fabricated using a strain-driven self-assembly mechanism. A mirror deflection of several degrees for driving voltages at 10 V was demonstrated and the dynamic response was investigated. (C) 2004 Elsevier B.V. All rights reserved.

引用

页码：78 / 81

页数：4

共 5 条

[1] Self-assembly of microstage using micro-origami technique on GaAs [J].