Towards pick-and-place assembly of nanostructures

被引：46

作者：

Molhave, K ^{[1
]}

Hansen, TM ^{[1
]}

Madsen, DN ^{[1
]}

Boggild, P ^{[1
]}

机构：

[1] Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark

来源：

JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | 2004年 / 4卷 / 03期

关键词：

nanomanipulation; nanowire; nanotube; tweezers; electron beam deposition or electron beam induced deposition;

D O I：

10.1166/jnn.2004.025

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

We examine an approach to three-dimensional pick-and-place assembly of wire-like nanoscale components, such as carbon nanotubes and silicon nanowires, on microstructures inside a scanning electron microscope. In this article we demonstrate that microfabricated electrostatically actuated tweezers can pick up silicon nanowires and show how electron beam deposition of carbon residues can be used to assemble carbon nanotubes on microelectrodes.

引用

页码：279 / 282

页数：4

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