The quantum efficiency of pn-detectors from the near infrared to the soft X-ray region

被引：39

作者：

Hartmann, R ^{[1
]}

Stephan, KH ^{[1
]}

Strüder, L ^{[1
]}

机构：

[1] MPO Halbleiterlabor, Max Planck Inst Extraterr Phys, D-81245 Munich, Germany

来源：

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2000年 / 439卷 / 2-3期

关键词：

quantum efficiency; silicon pn detector; X-ray; optical region;

D O I：

10.1016/S0168-9002(99)00919-5

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

The quantum efficiency of back-illuminated silicon pn-junction detectors is evaluated in the spectral range from 1.2 to 1400 eV, comprising the near infrared, visible, ultraviolet and soft X-ray regions. The calibrations are performed with the same device over the entire measured range, thus eliminating technological variations of the entrance window. Recent technological developments have yielded detectors with near-theoretical quantum efficiencies. (C) 2000 Elsevier Science B.V. All rights reserved.

引用

页码：216 / 220

页数：5

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