Phonon confinement and self-limiting oxidation effect of silicon nanowires synthesized by laser ablation

被引:47
作者
Fukata, N.
Oshima, T.
Okada, N.
Murakami, K.
Kizuka, T.
Tsurui, T.
Ito, S.
机构
[1] Natl Inst Mat Sci, Adv Elect Mat Ctr, Tsukuba, Ibaraki 3050044, Japan
[2] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
[3] Univ Tsukuba, Inst Sci Mat, Tsukuba, Ibaraki 3058573, Japan
[4] Tohoku Univ, Inst Mat Res, Sendai, Miyagi 9808577, Japan
[5] Univ Tsukuba, Special Res Project Nanosci, Tsukuba, Ibaraki 3058573, Japan
关键词
D O I
10.1063/1.2218386
中图分类号
O59 [应用物理学];
学科分类号
摘要
The phonon confinement and self-limiting oxidation effects of silicon nanowires (SiNWs) synthesized by laser ablation were investigated. The size of SiNWs was controlled by the synthesis parameters during laser ablation and the subsequent thermal oxidation. Thermal oxidation increases the thickness of the SiNWs' surface oxide layer, resulting in a decrease in their crystalline Si core diameter. This effect causes a downshift and asymmetric broadening of the Si optical phonon peak due to phonon confinement, while excess oxidation causes an upshift due to compressive stress. The compressive stress retarded the oxidation of the SiNWs by self-limiting oxidation effect. This result shows that the Si core diameter can be controlled by compressive stress. (c) 2006 American Institute of Physics.
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页数:7
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