Laser writing on gold-containing hydrocarbon matrix films deposited by a technique combining cathodic sputtering with hydrocarbon plasma polymerization

Conducting metal tracings have been realized on gold-containing hydrocarbon matrix films deposited on glass and silicon substrates by a technique combining cathodic sputtering with radio-frequency glow discharge. The metal tracings were formed as a consequence of laser irradiation of the films, which permitted the generation of localized heating which decomposed the hydrocarbon matrix and agglomerated the gold particles leaving conducting patterns. We studied the influence of some interfaces (nickel-chromium and titanium) in order to improve the adhesion and mechanical resistance of the gold line. The acquired gold features were mainly characterized by 'scotch and scratch test' and scanning electronic microscopy (SEM). (C) 1999 Elsevier Science S.A. All rights reserved.