LASER WRITING ON GOLD-CONTAINING HYDROCARBON FILMS

被引:6
作者
CAMBRIL, E
AKINNIFESI, J
ENJALBERT, JM
DESPAX, B
机构
关键词
D O I
10.1088/0022-3727/26/1/024
中图分类号
O59 [应用物理学];
学科分类号
摘要
Conducting metal tracings have been realized on gold-containing hydrocarbon matrix films deposited on glass by a technique combining cathodic sputtering with RF glow discharge. The metal tracings were formed as a consequence of laser irradiation of the films, based on an anomalous optical absorption property of the films at a particular laser wavelength, which generated a localized heating that decomposed the hydrocarbon matrix. The tracings were found to be continuous at a constant laser spot size of 10 mum, and their widths varied linearly with the applied laser power. A decrease of about 15 decades in the resistivity due to the resultant tracings was observed, making the conductivity close to that of the pure metal. Auger spectroscopy analysis of the tracings has shown that the hydrocarbon component was completely eliminated from them. Furthermore, the thermal stability of the material allowed its realization in ambient conditions.
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页码:149 / 153
页数:5
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