SYNTHESIS OF GOLD CARBON COMPOSITES BY SIMULTANEOUS SPUTTERING AND PLASMA POLYMERIZATION OF PROPANE IN RF CAPACITIVELY COUPLED DIODE SYSTEM (13.56 MHZ)

被引：23

作者：

DESPAX, B

FLOUTTARD, JL

机构：

来源：

THIN SOLID FILMS | 1989年 / 168卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90691-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：81 / 88

页数：8

共 15 条

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