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SYNTHESIS OF GOLD CARBON COMPOSITES BY SIMULTANEOUS SPUTTERING AND PLASMA POLYMERIZATION OF PROPANE IN RF CAPACITIVELY COUPLED DIODE SYSTEM (13.56 MHZ)

被引：23
作者：
DESPAX, B
FLOUTTARD, JL
机构：
来源：
THIN SOLID FILMS | 1989年 / 168卷 / 01期
关键词：
D O I：
10.1016/0040-6090(89)90691-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：81 / 88
页数：8
相关论文
共 15 条
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