共 37 条
[34]
SILICON-NITRIDE ELABORATED BY LOW-PRESSURE CHEMICAL VAPOR-DEPOSITION FROM SI2H6 AND NH3 AT LOW-TEMPERATURE
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
1993, 17 (1-3)
:185-189
[36]
TAYLOR PA, 1989, SURF SCI, V215, pL286, DOI 10.1016/0039-6028(89)90693-6