On the quantification of SNMS analyses of silicate glasses and oxide coatings

被引：20

作者：

Schmitz, R

Frischat, GH

Paulus, H

Muller, KH

机构：

[1] UNIV GESAMTHSCH PADERBORN,ABT SOEST,INST TECHNOL & WISSENSTRANSFER,HSCH ABT SOEST,D-59494 SOEST,GERMANY

[2] UNIV GESAMTHSCH PADERBORN,ABT SOEST,FACHBEREICH ELEKT ENERGIETECH,D-59494 SOEST,GERMANY

来源：

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY | 1997年 / 358卷 / 1-2期

关键词：

D O I：

10.1007/s002160050341

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

The new high frequency mode (HFM) of the SNMS apparatus, type INA3. is especially suited for the analysis of electrically non-conducting materials. Experiments were carried out with glasses and various oxide coatings in order to demonstrate the quantifiability of HFM analyses with respect to these materials, The influence of the composition of the samples and the selected parameters of the HFM, such as accelerating voltage, duty cycle and frequency, on the quantifiability of the measurements are discussed. It is shown that quantification is possible within certain limits of composition.

引用

页码：42 / 46

页数：5

共 14 条

[1] SURFACE-ANALYSIS OF SOL-GEL COATINGS ON GLASS BY SECONDARY NEUTRAL MASS-SPECTROMETRY [J].

AMBOS, R ;

RADLEIN, E ;

FRISCHAT, GH .

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1995, 353 (5-8) :614-618

[2]

AMBOS R, 1996, THESIS TU CLAUSTHAL

[3]

AMBOS R, 1996, GLASTECH BER GLAS SC

[4] HIGH-RESOLUTION DEPTH PROFILING OF NONCONDUCTING SAMPLES WITH SNMS [J].

BOCK, W ;

KOPNARSKI, M ;

OECHSNER, H .

FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1995, 353 (5-8) :510-513

[5]

JEDE R, 1992, PRACTICAL SURFACE AN, V2, P425

[6] PERFORMANCE OF A NEW ION OPTICS FOR QUASISIMULTANEOUS SECONDARY ION, SECONDARY NEUTRAL, AND RESIDUAL-GAS MASS-SPECTROMETRY [J].

LIPINSKY, D ;

JEDE, R ;

GANSCHOW, O ;

BENNINGHOVEN, A .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (05) :2007-2017

[7]

Mazurin O. V., 1987, HDB GLASS DATA C

[8]

MULLER KH, 1989, FESENIUS Z ANAL CHEM, V33, P498

[9] SECONDARY NEUTRAL MASS-SPECTROMETRY (SNMS)-RECENT METHODICAL PROGRESS AND APPLICATIONS TO FUNDAMENTAL-STUDIES IN PARTICLE SURFACE INTERACTION [J].

OECHSNER, H .

INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1995, 143 :271-282

[10]

OECHSNER H, 1984, TOP CURR PHYS, V37, P63

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