Transparent conductive oxide thin films of tungsten-doped indium oxide

被引：57

作者：

Li, Xifeng ^{[1
]}

Zhang, Qun ^{[1
]}

Miao, Weina ^{[1
]}

Huang, Li ^{[1
]}

Zhang, Zhuangjian ^{[1
]}

机构：

[1] Fudan Univ, Dept Mat Sci, Shanghai 200433, Peoples R China

来源：

THIN SOLID FILMS | 2006年 / 515卷 / 04期

关键词：

mobility; transparent conductive oxide; tungsten-doped indium oxide; indium oxide; sputtering;

D O I：

10.1016/j.tsf.2006.07.014

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Transparent conductive oxide thin film of tungsten-doped In2O3 (IWO) has been prepared by reactive direct current magnetron sputtering from the tungsten-embedded indium metal target. The effect of tungsten doping content on the optoelectrical properties of IWO films was investigated. The lowest resistivity of 2.7 x 10(-4) Omega(.)cm was reproducibly obtained, with carrier mobility greater than 57 cm(2) V-1 s(-1) and carrier concentration of 4.0 x 10(20) cm(-3), as well as the transmission in visible light range exceeding 80%. X-ray diffraction measurements indicate that the as-deposited IWO films are well crystallized with a preferential orientation of (222). (c) 2006 Elsevier B.V. All rights reserved.

引用

页码：2471 / 2474

页数：4

共 15 条

[1] Characterization of transparent conducting oxides [J].

Coutts, TJ ;

Young, DL ;

Li, XN .

MRS BULLETIN, 2000, 25 (08) :58-65

[2] EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS [J].

HAMBERG, I ;

GRANQVIST, CG .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) :R123-R159

[3] The electrical and optical properties of molybdenum-doped indium oxide films grown at room temperature from metallic target [J].

Li, XF ;

Miao, WN ;

Zhang, Q ;

Huang, L ;

Zhang, ZJ ;

Hua, ZY .

SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2005, 20 (08) :823-828

[4] Preparation of molybdenum-doped indium oxide thin films using reactive direct-current magnetron sputtering [J].

Li, XF ;

Miao, WN ;

Zhang, Q ;

Huang, L ;

Zhang, ZJ ;

Hua, ZY .

JOURNAL OF MATERIALS RESEARCH, 2005, 20 (06) :1404-1408

[5] Molybdenum-doped indium oxide transparent conductive thin films [J].

Meng, Y ;

Yang, XL ;

Chen, HX ;

Shen, J ;

Jiang, YM ;

Zhang, ZJ ;

Hua, ZY .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2002, 20 (01) :288-290

[6]

Meng Y, 2001, THIN SOLID FILMS, V394, P219

[7] Optical and electrical properties of direct-current magnetron sputtered ZnO:Al films [J].

Pei, ZL ;

Sun, C ;

Tan, MH ;

Xiao, JQ ;

Guan, DH ;

Huang, RF ;

Wen, LS .

JOURNAL OF APPLIED PHYSICS, 2001, 90 (07) :3432-3436

[8] Electromagnetic absorption in transparent conducting films [J].

Porch, A ;

Morgan, DV ;

Perks, RM ;

Jones, MO ;

Edwards, PP .

JOURNAL OF APPLIED PHYSICS, 2004, 95 (09) :4734-4737

[9] ELECTRICAL AND OPTICAL-PROPERTIES OF UNDOPED AND ANTIMONY-DOPED TIN OXIDE-FILMS [J].

SHANTHI, E ;

DUTTA, V ;

BANERJEE, A ;

CHOPRA, KL .

JOURNAL OF APPLIED PHYSICS, 1980, 51 (12) :6243-6251

[10] Effects of oxygen contents on the electrical and optical properties of indium molybdenum oxide films fabricated by high density plasma-evaporation [J].

Sun, SY ;

Huang, JL ;

Lii, DF .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2004, 22 (04) :1235-1241

← 1 2 →