The dependence of dielectric properties on compositional variation for tunable device applications
被引:26
作者:
Cole, MW
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机构:
USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Cole, MW
[1
]
Geyer, RG
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Geyer, RG
机构:
[1] USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
[2] Natl Inst Stand & Technol, RF Technol Div, Boulder, CO 80303 USA
dielectric properties;
deposition process;
microwave measurements;
film micro structure;
D O I:
10.1016/j.mechmat.2003.04.001
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
The materials properties of undoped and low concentration Mg doped Ba0.6Sr0.4TiO3 (BST) thin films are reported. The films were fabricated on single crystal (1 0 0) MgO and Pt coated Si substrates via the metalorganic solution deposition (MOSD) technique using carboxylate-alkoxide precursors and post-deposition annealed at 800 degreesC (film/MgO substrates) and 750 degreesC (film/Pt-Si substrates). The dielectric properties were measured at 10 GHz using unpatterned/non-metallized films via a tuned coupled/split dielectric resonator system and at 100 kHz using metal-insulator-metal capacitors. The structure, microstructure, surface morphology and film/substrate compositional quality were analyzed and correlated to the films dielectric and insulating properties. The Mg doped BST films exhibited improved dielectric loss and insulating characteristics compared to the undoped BST thin films. The improved dielectric properties, low leakage current, and good tunability of the low level Mg doped BST thin films merits strong potential for utilization in microwave tunable devices. (C) 2003 Elsevier Ltd. All rights reserved.
机构:
USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Cole, MW
;
Joshi, PC
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Joshi, PC
;
Ervin, MH
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Ervin, MH
;
Wood, MC
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机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Wood, MC
;
Pfeffer, RL
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h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Cole, MW
;
Joshi, PC
论文数: 0引用数: 0
h-index: 0
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Joshi, PC
;
Ervin, MH
论文数: 0引用数: 0
h-index: 0
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Joshi, PC
;
Cole, MW
论文数: 0引用数: 0
h-index: 0
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
机构:
USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Cole, MW
;
Joshi, PC
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Joshi, PC
;
Ervin, MH
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h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Ervin, MH
;
Wood, MC
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Wood, MC
;
Pfeffer, RL
论文数: 0引用数: 0
h-index: 0
机构:USA, Res Lab, Weapons & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Cole, MW
;
Joshi, PC
论文数: 0引用数: 0
h-index: 0
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Joshi, PC
;
Ervin, MH
论文数: 0引用数: 0
h-index: 0
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA
Joshi, PC
;
Cole, MW
论文数: 0引用数: 0
h-index: 0
机构:
USA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USAUSA, Res Lab, Weap & Mat Res Directorate, Aberdeen Proving Ground, MD 21005 USA