Deconvolution of local surface response from topography in nanometer profilometry with a dual-scan method

被引:24
作者
Tsai, CW [1 ]
Lee, CH [1 ]
Wang, J [1 ]
机构
[1] Acad Sinica, Inst Atom & Mol Sci, Taipei 106, Taiwan
关键词
D O I
10.1364/OL.24.001732
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
In profilometric measurements, by scanning the sample twice with a fixed vertical offset, one can separate the signal that comes from surface heterogeneity from the topographic signal. Using differential confocal microscopy, a newly developed open-loop nanometer profilometric technique, we demonstrated this dual-scan method on composite samples and obtained 10-nm depth resolution. This technique can also be applied to other profilometric techniques such as atomic force microscopy and scanning tunneling microscopy. (C) 1999 Optical Society of America.
引用
收藏
页码:1732 / 1734
页数:3
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