Observation of coreless dislocations in alpha-GaN

被引:89
作者
Cherns, D
Young, WT
Steeds, JW
Ponce, FA
Nakamura, S
机构
[1] XEROX CORP,PALO ALTO RES CTR,PALO ALTO,CA 94304
[2] NICHIA CHEM IND,ANAN,TOKUSHIMA 774,JAPAN
关键词
dislocations; convergent beam electron diffraction; semiconductors; thin film growth; chemical vapour deposition;
D O I
10.1016/S0022-0248(97)00081-X
中图分类号
O7 [晶体学];
学科分类号
0702 ; 070205 ; 0703 ; 080501 ;
摘要
Large-angle convergent beam electron diffraction is used to show that hollow tubes, 5-25 nm in diameter, observed in alpha-GaN grown on sapphire by metalorganic chemical vapor deposition, contain screw dislocations with Burgers vectors c (0.52 nm). It is shown that these coreless dislocations are not in an equilibrium state but may arise by the trapping of dislocations at pinholes at an early stage of GaN growth. Although pinholes may contain a, c and c + a dislocations, it is argued that only those containing c dislocations can survive to generate nanopipes of constant cross-section along the [0001] axis, as observed experimentally.
引用
收藏
页码:201 / 206
页数:6
相关论文
共 21 条
[1]   CORELESS DEFECTS AND THE CONTINUITY OF EPITAXIAL NISI2/SI(100) THIN-FILMS [J].
BATSTONE, JL ;
GIBSON, JM ;
TUNG, RT ;
LEVI, AFJ .
APPLIED PHYSICS LETTERS, 1988, 52 (10) :828-830
[2]   ANALYSIS OF PARTIAL AND STAIR-ROD DISLOCATIONS BY LARGE-ANGLE CONVERGENT-BEAM ELECTRON-DIFFRACTION [J].
CHERNS, D ;
MORNIROLI, JP .
ULTRAMICROSCOPY, 1994, 53 (02) :167-180
[3]   CONVERGENT BEAM DIFFRACTION STUDIES OF INTERFACES, DEFECTS, AND MULTILAYERS [J].
CHERNS, D ;
PRESTON, AR .
JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE, 1989, 13 (02) :111-122
[4]  
CHERNS D, UNPUB PHIL MAG
[5]  
CHERNS D, 1986, 11TH P INT C EL MICR, V1, P721
[6]  
ESHELBY D, 1958, PHILOS MAG, V3, P440
[7]   SCREW DISLOCATIONS IN THIN RODS [J].
ESHELBY, JD .
JOURNAL OF APPLIED PHYSICS, 1953, 24 (02) :176-179
[8]   CAPILLARY EQUILIBRIA OF DISLOCATED CRYSTALS [J].
FRANK, FC .
ACTA CRYSTALLOGRAPHICA, 1951, 4 (06) :497-501
[9]   INSITU MONITORING OF GAN GROWTH USING INTERFERENCE EFFECTS [J].
NAKAMURA, S .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (08) :1620-1627
[10]   Theory of GaN(10(1)over-bar-0) and (11(2)over-bar-0) surfaces [J].
Northrup, JE ;
Neugebauer, J .
PHYSICAL REVIEW B, 1996, 53 (16) :10477-10480