Inkjet-printed InGaZnO thin film transistor

被引：155

作者：

Kim, Gun Hee ^{[1
]}

Kim, Hyun Soo ^{[1
]}

Shin, Hyun Soo ^{[1
]}

Ahn, Byun Du ^{[1
]}

Kim, Kyung Ho ^{[1
]}

Kim, Hyun Jae ^{[1
]}

机构：

[1] Yonsei Univ, Sch Elect & Elect Engn, Seoul 120749, South Korea

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 14期

关键词：

IGZO; Inkjet printing; Thin film transistor; TRANSPARENT; SPECTROSCOPY; MECHANISM; RF;

D O I：

10.1016/j.tsf.2009.01.151

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We report inkjet-printed InGaZnO (IGZO) thin film transistors (TFTs). IGZO ink was prepared by dissolving indium nitrate hydrate, gallium nitrate hydrate and zinc acetate dihydrate into 2-methoxyethanol with additional stabilizers. The resulting films were inkjet-printed with a resolution of 300 dots per inch using droplets with a diameter of 40 mu m, and a volume of 35 pl. The films exhibited high optical transparency in the visible range and had a polycrystalline phase of InGaO3(ZnO)(2) after thermal annealing treatment. The chemical composition of this IGZO sample was also determined, and shown to have high stoichiometric characteristics of low oxygen deficiency. The TFTs with a conventional inverted staggered structure using inkjet-printed IGZO as an active channel layer had a field-effect mobility of similar to 0.03 cm(2)/Vs in saturation region and an on-to-off current ratio greater than similar to 10(4). (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：4007 / 4010

页数：4

共 25 条

[21] Thin-film transistor fabricated in single-crystalline transparent oxide semiconductor [J].

Nomura, K ;

Ohta, H ;

Ueda, K ;

Kamiya, T ;

Hirano, M ;

Hosono, H .

SCIENCE, 2003, 300 (5623) :1269-1272

[22] GA2O3 FILMS FOR ELECTRONIC AND OPTOELECTRONIC APPLICATIONS [J].

PASSLACK, M ;

SCHUBERT, EF ;

HOBSON, WS ;

HONG, M ;

MORIYA, N ;

CHU, SNG ;

KONSTADINIDIS, K ;

MANNAERTS, JP ;

SCHNOES, ML ;

ZYDZIK, GJ .

JOURNAL OF APPLIED PHYSICS, 1995, 77 (02) :686-693

[23] NOVEL MECHANISM FOR HIGH-SPEED GROWTH OF TRANSPARENT AND CONDUCTING TIN OXIDE THIN-FILMS BY SPRAY-PYROLYSIS [J].

RAO, LK ;

VINNI, V .

APPLIED PHYSICS LETTERS, 1993, 63 (05) :608-610

[24] High-resolution inkjet printing of all-polymer transistor circuits [J].

Sirringhaus, H ;

Kawase, T ;

Friend, RH ;

Shimoda, T ;

Inbasekaran, M ;

Wu, W ;

Woo, EP .

SCIENCE, 2000, 290 (5499) :2123-2126

[25] High-performance organic thin-film transistors with solution-printed gold contacts [J].

Wu, YL ;

Li, YN ;

Ong, BS ;

Liu, P ;

Gardner, S ;

Chiang, B .

ADVANCED MATERIALS, 2005, 17 (02) :184-+

← 1 2 3 →