Multichannel carbon-nanotube FETs and complementary logic gates with nanowelded contacts

被引:39
作者
Chen, Changxin [1 ]
Xu, Dong [1 ]
Kong, Eric Siu-Wai [1 ]
Zhang, Yafei [1 ]
机构
[1] Shanghai Jiao Tong Univ, Natl Key Lab Nanomicro Fabricat Technol, Key Lab Thin Film & Microfabrat Minist Educ, Inst Micronano Sci & Technol, Shanghai 200030, Peoples R China
基金
中国国家自然科学基金;
关键词
complementary inverters; electric-field alignment; multichannel carbon-nanotube field-effect transistors (MC-CNTFEts); ultrasonic nanowelding;
D O I
10.1109/LED.2006.882530
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A high-performance multichannel carbon-nanotube field-effect transistor (MC-CNTFET) has been built by applying an array of parallel nanowelded single-walled carbon nanotubes (SWCNTs) as the channels. The SWCNT channel array with good directional and spatial control was obtained by the ac electric-field alignment of SWCNTs on a specially designed electrode. An ultrasonic nanowelding technique was utilized to achieve the reliable and highly transparent contacts between SWCNT channels and electrodes. Both p- and n-MC-CNTFETs fabricated exhibit high performance. Key transistor performance parameters, transconductance and carrier mobility reach 50.2 mu S and 7160 cm(2) (.) V-1 . s(-1) for p-MC-CNTFETs, and 36.5 mu S and 5311 cm(2 .) V-1 (.) s(-1) for n-MC-CNTFETs, respectively. Using the authors' techniques, complementary inverters with a high gain of up to 31.2 have also been demonstrated.
引用
收藏
页码:852 / 855
页数:4
相关论文
共 23 条
[21]   High-mobility carbon-nanotube thin-film transistors on a polymeric substrate [J].
Snow, ES ;
Campbell, PM ;
Ancona, MG ;
Novak, JP .
APPLIED PHYSICS LETTERS, 2005, 86 (03) :1-3
[22]   Contact resistance of carbon nanotubes [J].
Tersoff, J .
APPLIED PHYSICS LETTERS, 1999, 74 (15) :2122-2124
[23]   Advantages of top-gate, high-k dielectric carbon nanotube field-effect transistors [J].
Yang, MH ;
Teo, KBK ;
Gangloff, L ;
Milne, WI ;
Hasko, DG ;
Robert, Y ;
Legagneux, P .
APPLIED PHYSICS LETTERS, 2006, 88 (11)