Imaging-XPS/Raman investigation on the carbonization of polyimide after irradiation at 308 nm

被引：51

作者：

Lippert, T ^{[1
]}

Ortelli, E ^{[1
]}

Panitz, JC ^{[1
]}

Raimondi, F ^{[1
]}

Wambach, J ^{[1
]}

Wei, J ^{[1
]}

Wokaun, A ^{[1
]}

机构：

[1] Paul Scherrer Inst, CH-5232 Villigen, Switzerland

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1999年 / 69卷 / Suppl 1期

关键词：

D O I：

10.1007/s003390051497

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The laser ablation of polyimide was studied using 308 nm laser irradiation less than or equal to 225 mJ cm(-2). Confocal Raman microscopy revealed the deposition of carbon surrounding the ablation crater, which consists of amorphous carbon with some crystalline features. Inside the crater, graphitic material was detected on top of the cones, very similar to the material from cw-Ar+ ion laser irradiation. FT-Raman measurements reveal the presence of intermediates of the polyimide decomposition. Imaging-X-ray photoelectron spectroscopy confirmed the deposition of carbon material surrounding the ablation crater and showed that the oxygen and nitrogen contents of the remaining material decrease.

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页码：S651 / S654

页数：4

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