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X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES ON MODIFIED POLYIMIDE SURFACES AFTER ABLATION WITH A KRF EXCIMER LASER
被引:33
作者
:
KOKAI, F
论文数:
0
引用数:
0
h-index:
0
KOKAI, F
SAITO, H
论文数:
0
引用数:
0
h-index:
0
SAITO, H
FUJIOKA, T
论文数:
0
引用数:
0
h-index:
0
FUJIOKA, T
机构
:
来源
:
JOURNAL OF APPLIED PHYSICS
|
1989年
/ 66卷
/ 07期
关键词
:
D O I
:
10.1063/1.344117
中图分类号
:
O59 [应用物理学];
学科分类号
:
摘要
:
引用
收藏
页码:3252 / 3255
页数:4
相关论文
共 22 条
[1]
DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER
ANDREW, JE
论文数:
0
引用数:
0
h-index:
0
ANDREW, JE
DYER, PE
论文数:
0
引用数:
0
h-index:
0
DYER, PE
FORSTER, D
论文数:
0
引用数:
0
h-index:
0
FORSTER, D
KEY, PH
论文数:
0
引用数:
0
h-index:
0
KEY, PH
[J].
APPLIED PHYSICS LETTERS,
1983,
43
(08)
: 717
-
719
[2]
EXCIMER LASER ETCHING OF POLYIMIDE
BRANNON, JH
论文数:
0
引用数:
0
h-index:
0
BRANNON, JH
LANKARD, JR
论文数:
0
引用数:
0
h-index:
0
LANKARD, JR
BAISE, AI
论文数:
0
引用数:
0
h-index:
0
BAISE, AI
BURNS, F
论文数:
0
引用数:
0
h-index:
0
BURNS, F
KAUFMAN, J
论文数:
0
引用数:
0
h-index:
0
KAUFMAN, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(05)
: 2036
-
2043
[3]
CLARK DT, 1977, ADV POLYM SCI, V24, P126
[4]
EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS
DYER, PE
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
DYER, PE
SIDHU, J
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
SIDHU, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
57
(04)
: 1420
-
1422
[5]
CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS
GORODETSKY, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
GORODETSKY, G
KAZYAKA, TG
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
KAZYAKA, TG
MELCHER, RL
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
MELCHER, RL
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
APPLIED PHYSICS LETTERS,
1985,
46
(09)
: 828
-
830
[6]
EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS
KOREN, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
KOREN, G
YEH, JTC
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
YEH, JTC
[J].
APPLIED PHYSICS LETTERS,
1984,
44
(12)
: 1112
-
1114
[7]
KOREN G, 1984, J APPL PHYS, V56, P2121
[8]
CONTROLLED MODIFICATION OF ORGANIC POLYMER SURFACES BY CONTINUOUS WAVE FAR-ULTRAVIOLET (185NM) AND PULSED-LASER (193NM) RADIATION - XPS STUDIES
LAZARE, S
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAZARE, S
HOH, PD
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
HOH, PD
BAKER, JM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BAKER, JM
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY,
1984,
106
(15)
: 4288
-
4290
[9]
SURFACE-PROPERTIES OF POLY(ETHYLENE-TEREPHTHALATE) FILMS MODIFIED BY FAR-ULTRAVIOLET RADIATION AT 193-NM (LASER) AND 185-NM (LOW INTENSITY)
LAZARE, S
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAZARE, S
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
JOURNAL OF PHYSICAL CHEMISTRY,
1986,
90
(10)
: 2124
-
2131
[10]
Leary H. J. Jr., 1979, Surface and Interface Analysis, V1, P75, DOI 10.1002/sia.740010302
←
1
2
3
→
共 22 条
[1]
DIRECT ETCHING OF POLYMERIC MATERIALS USING A XECL LASER
ANDREW, JE
论文数:
0
引用数:
0
h-index:
0
ANDREW, JE
DYER, PE
论文数:
0
引用数:
0
h-index:
0
DYER, PE
FORSTER, D
论文数:
0
引用数:
0
h-index:
0
FORSTER, D
KEY, PH
论文数:
0
引用数:
0
h-index:
0
KEY, PH
[J].
APPLIED PHYSICS LETTERS,
1983,
43
(08)
: 717
-
719
[2]
EXCIMER LASER ETCHING OF POLYIMIDE
BRANNON, JH
论文数:
0
引用数:
0
h-index:
0
BRANNON, JH
LANKARD, JR
论文数:
0
引用数:
0
h-index:
0
LANKARD, JR
BAISE, AI
论文数:
0
引用数:
0
h-index:
0
BAISE, AI
BURNS, F
论文数:
0
引用数:
0
h-index:
0
BURNS, F
KAUFMAN, J
论文数:
0
引用数:
0
h-index:
0
KAUFMAN, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
58
(05)
: 2036
-
2043
[3]
CLARK DT, 1977, ADV POLYM SCI, V24, P126
[4]
EXCIMER LASER ABLATION AND THERMAL COUPLING EFFICIENCY TO POLYMER-FILMS
DYER, PE
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
DYER, PE
SIDHU, J
论文数:
0
引用数:
0
h-index:
0
机构:
Univ of Hull, Dep of Applied, Physics, Hull, Engl, Univ of Hull, Dep of Applied Physics, Hull, Engl
SIDHU, J
[J].
JOURNAL OF APPLIED PHYSICS,
1985,
57
(04)
: 1420
-
1422
[5]
CALORIMETRIC AND ACOUSTIC STUDY OF ULTRAVIOLET-LASER ABLATION OF POLYMERS
GORODETSKY, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
GORODETSKY, G
KAZYAKA, TG
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
KAZYAKA, TG
MELCHER, RL
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
MELCHER, RL
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,POB 218,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
APPLIED PHYSICS LETTERS,
1985,
46
(09)
: 828
-
830
[6]
EMISSION-SPECTRA, SURFACE QUALITY, AND MECHANISM OF EXCIMER LASER ETCHING OF POLYIMIDE FILMS
KOREN, G
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
KOREN, G
YEH, JTC
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
YEH, JTC
[J].
APPLIED PHYSICS LETTERS,
1984,
44
(12)
: 1112
-
1114
[7]
KOREN G, 1984, J APPL PHYS, V56, P2121
[8]
CONTROLLED MODIFICATION OF ORGANIC POLYMER SURFACES BY CONTINUOUS WAVE FAR-ULTRAVIOLET (185NM) AND PULSED-LASER (193NM) RADIATION - XPS STUDIES
LAZARE, S
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAZARE, S
HOH, PD
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
HOH, PD
BAKER, JM
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
BAKER, JM
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY,
1984,
106
(15)
: 4288
-
4290
[9]
SURFACE-PROPERTIES OF POLY(ETHYLENE-TEREPHTHALATE) FILMS MODIFIED BY FAR-ULTRAVIOLET RADIATION AT 193-NM (LASER) AND 185-NM (LOW INTENSITY)
LAZARE, S
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
LAZARE, S
SRINIVASAN, R
论文数:
0
引用数:
0
h-index:
0
机构:
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
IBM CORP,THOMAS J WATSON RES CTR,YORKTOWN HTS,NY 10598
SRINIVASAN, R
[J].
JOURNAL OF PHYSICAL CHEMISTRY,
1986,
90
(10)
: 2124
-
2131
[10]
Leary H. J. Jr., 1979, Surface and Interface Analysis, V1, P75, DOI 10.1002/sia.740010302
←
1
2
3
→