X-RAY PHOTOELECTRON-SPECTROSCOPY STUDIES ON MODIFIED POLYIMIDE SURFACES AFTER ABLATION WITH A KRF EXCIMER LASER

[11] LEARY HJ, 1981, ACS SYM SER, V162, P419

[12] Roberts R. F., 1980, Surface and Interface Analysis, V2, P5, DOI 10.1002/sia.740020103

[13] HARTREE-SLATER SUBSHELL PHOTOIONIZATION CROSS-SECTIONS AT 1254 AND 1487EV [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (02) : 129 - 137

[14] ABLATIVE PHOTO-DECOMPOSITION - ACTION OF FAR ULTRAVIOLET (193-NM) LASER-RADIATION ON POLY(ETHYLENE-TEREPHTHALATE) FILMS [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1982, 104 (24) : 6784 - 6785

[15] ACTION OF FAR ULTRAVIOLET-RADIATION (185-NM) ON POLY(ETHYLENE-TEREPHTHALATE) FILMS - A METHOD FOR CONTROLLED DRY-ETCHING [J]. POLYMER, 1982, 23 (13) : 1863 - 1864

[16] ULTRAVIOLET-LASER ABLATION OF POLYIMIDE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) : 372 - 376

[17] ABLATIVE PHOTODECOMPOSITION OF POLYMER-FILMS BY PULSED FAR-ULTRAVIOLET (193 NM) LASER-RADIATION - DEPENDENCE OF ETCH DEPTH ON EXPERIMENTAL CONDITIONS [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1984, 22 (10) : 2601 - 2609

[18] ABLATION OF POLYMERS AND BIOLOGICAL TISSUE BY ULTRAVIOLET-LASERS [J]. SCIENCE, 1986, 234 (4776) : 559 - 565

[19] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION [J]. APPLIED PHYSICS LETTERS, 1982, 41 (06) : 576 - 578

[20] XPS STUDY ON THE THERMAL-DEGRADATION OF POLY-N,N'/4,4'-DIPHENYLETHER PYROMELLITIMIDE [J]. SURFACE AND INTERFACE ANALYSIS, 1986, 8 (06) : 261 - 266

[11] LEARY HJ, 1981, ACS SYM SER, V162, P419

[12] Roberts R. F., 1980, Surface and Interface Analysis, V2, P5, DOI 10.1002/sia.740020103

[13] HARTREE-SLATER SUBSHELL PHOTOIONIZATION CROSS-SECTIONS AT 1254 AND 1487EV [J]. JOURNAL OF ELECTRON SPECTROSCOPY AND RELATED PHENOMENA, 1976, 8 (02) : 129 - 137

[14] ABLATIVE PHOTO-DECOMPOSITION - ACTION OF FAR ULTRAVIOLET (193-NM) LASER-RADIATION ON POLY(ETHYLENE-TEREPHTHALATE) FILMS [J]. JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 1982, 104 (24) : 6784 - 6785

[15] ACTION OF FAR ULTRAVIOLET-RADIATION (185-NM) ON POLY(ETHYLENE-TEREPHTHALATE) FILMS - A METHOD FOR CONTROLLED DRY-ETCHING [J]. POLYMER, 1982, 23 (13) : 1863 - 1864

[16] ULTRAVIOLET-LASER ABLATION OF POLYIMIDE FILMS [J]. JOURNAL OF APPLIED PHYSICS, 1987, 61 (01) : 372 - 376

[17] ABLATIVE PHOTODECOMPOSITION OF POLYMER-FILMS BY PULSED FAR-ULTRAVIOLET (193 NM) LASER-RADIATION - DEPENDENCE OF ETCH DEPTH ON EXPERIMENTAL CONDITIONS [J]. JOURNAL OF POLYMER SCIENCE PART A-POLYMER CHEMISTRY, 1984, 22 (10) : 2601 - 2609

[18] ABLATION OF POLYMERS AND BIOLOGICAL TISSUE BY ULTRAVIOLET-LASERS [J]. SCIENCE, 1986, 234 (4776) : 559 - 565

[19] SELF-DEVELOPING PHOTOETCHING OF POLY(ETHYLENE-TEREPHTHALATE) FILMS BY FAR ULTRAVIOLET EXCIMER LASER-RADIATION [J]. APPLIED PHYSICS LETTERS, 1982, 41 (06) : 576 - 578

[20] XPS STUDY ON THE THERMAL-DEGRADATION OF POLY-N,N'/4,4'-DIPHENYLETHER PYROMELLITIMIDE [J]. SURFACE AND INTERFACE ANALYSIS, 1986, 8 (06) : 261 - 266