Sodium microsensors based on ISFET/REFET prepared through an ion-implantation process fully compatible with a standard silicon technology

被引：12

作者：

Baccar, ZM ^{[1
]}

JaffrezicRenault, N ^{[1
]}

Martelet, C ^{[1
]}

Jaffrezic, H ^{[1
]}

Marest, G ^{[1
]}

Plantier, A ^{[1
]}

机构：

[1] UNIV LYON 1,IPNL,GRP TRAITEMENT SURFACES,F-69622 VILLEURBANNE,FRANCE

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 1996年 / 32卷 / 02期

关键词：

Na+-ISFET/REFET; ion implantation; sensitivity; electrochemical sensors;

D O I：

10.1016/0925-4005(96)80117-1

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Characteristics of Na-ISFET and REFET microsensors produced by a mild ion-implantation technique are investigated in order to design a selective sodium-ion microsensor operating in a differential mode. By implanting a fluence of 2 X 10(16) ions cm(-2) of Al+ at 10 keV and Na+ at 7 keV into the Na-ISFET and a fluence of 10(14) ions cm(-2) of Al+ and of Na+ at the same energies for the REFET, the potassium interference can be minimized and a signal of 58 mV pNa(-1) in the range 10(-4) to 10(-1) M can be obtained in the differential mode, with a detection limit of about 10(-7) M.

引用

页码：101 / 105

页数：5

共 13 条

[1]

BACCAR ZM, 1996, J ELECTROCHEM SOC, V148, P1422

[2]

BIERSACK JP, 1992, TRIM PROGRAM

[3] THE ROLE OF BURIED OH-SITES IN THE RESPONSE MECHANISM OF INORGANIC-GATE PH-SENSITIVE ISFETS [J].

BOUSSE, L ;

BERGVELD, P .

SENSORS AND ACTUATORS, 1984, 6 (01) :65-78

[4]

ENGBERSEN JFJ, 1994, ANAL MAGAZINE, V22, P16

[5] ISFETS WITH ION-SENSITIVE MEMBRANES FABRICATED BY ION-IMPLANTATION [J].

ITO, T ;

INAGAKI, H ;

IGARASHI, I .

IEEE TRANSACTIONS ON ELECTRON DEVICES, 1988, 35 (01) :56-64

[6] THIN INSULATOR FILMS CHEMICALLY SENSIBILIZED BY ION-IMPLANTATION FOR USE IN ISFETS - STUDIES ON THE DRIFT EFFECT IN NAS MEMBRANES [J].

PHAM, MT ;

HOFFMANN, W ;

HULLER, J .

SENSORS AND ACTUATORS B-CHEMICAL, 1992, 8 (03) :227-230

[7] CHARACTERIZATION OF ION-IMPLANTED GATE INSULATOR FILMS FOR USE AS ION-SELECTIVE MEMBRANE IN ISFETS [J].

PHAM, MT .

SENSORS AND ACTUATORS B-CHEMICAL, 1992, 7 (1-3) :576-579

[8]

PHAM MT, 1993, SENSOR ACTUAT B-CHEM, V13, P746

[9]

RAWN J, 1990, TRAITE BIOCH, P1028

[10] AN OXYNITRIDE ISFET MODIFIED FOR WORKING IN A DIFFERENTIAL-MODE FOR PH DETECTION [J].

ROCHER, V ;

CHOVELON, JM ;

JAFFREZICRENAULT, N ;

CROS, Y ;

BIROT, D .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1994, 141 (02) :535-539

← 1 2 →