Ablation of poly(methyl methacrylate) by a single pulse of soft X-rays emitted from Z-pinch and laser-produced plasmas

被引：37

作者：

Juha, L

Krása, J

Präg, A

Cejnarová, A

Chvostová, D

Rohlena, K

Jungwirth, K

Kravárik, J

Kubes, P

Bakshaev, YL

Chernenko, AS

Korolev, VD

Tumanov, VI

Ivanov, MI

Bernardinello, A

Ullschmied, J

Boody, FP

机构：

[1] Acad Sci Czech Republic, Inst Phys, Prague 18221 8, Czech Republic

[2] Czech Tech Univ, Fac Elect Engn, Dept Phys, Prague 16627 6, Czech Republic

[3] Kurchatov Inst, Russian Res Ctr, Moscow 123182, Russia

[4] Res Inst Pulsed Syst, Moscow 115304, Russia

[5] Univ Studi Milano Bicocca, Dipartimento Fis G Occhialini, I-20126 Milan, Italy

[6] Univ Studi Milano Bicocca, INFM, I-20126 Milan, Italy

[7] Acad Sci Czech Republic, Inst Plasma Phys, Prague 18221 8, Czech Republic

[8] Ion Light Technol GmbH, D-93077 Bad Abbach, Germany

来源：

SURFACE REVIEW AND LETTERS | 2002年 / 9卷 / 01期

关键词：

D O I：

10.1142/S0218625X02002257

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The efficiency of ablation induced in poly(methyl methacrylate) (PMMA) by single soft X-ray pulses emitted from Z-pinch and laser-produced plasmas was determined. X-ray ablation of PMMA was found to be less efficient than that of teflon (PTFE). Nonthermal effects of the radiation on the polymer structure play a key role in the mechanisms of the ablation, i.e. the ablation can be explained by the formation of radiation-chemical scissions of the polymer chain followed by blowoff of low-molecular fragment fluid into the vacuum. The most promising application of this phenomenon seems to be micropatterning/micromachining.

引用

页码：347 / 352

页数：6

共 43 条

[1] PHOTOSTIMULATED EVAPORATION OF SIO2-FILMS BY SYNCHROTRON RADIATION [J].