Wetting layer evolution in InAs/GaAs(001) heteroepitaxy: effects of surface reconstruction and strain

被引:42
作者
Krzyzewski, TJ [1 ]
Joyce, PB [1 ]
Bell, GR [1 ]
Jones, TS [1 ]
机构
[1] Univ London Imperial Coll Sci Technol & Med, Dept Chem, Ctr Elect Mat & Devices, London SW7 2AY, England
基金
英国工程与自然科学研究理事会;
关键词
indium arsenide; gallium arsenide; epitaxy; surface structure; morphology; roughness; and topography; surface relaxation and reconstruction; quantum effects; scanning tunneling microscopy;
D O I
10.1016/S0039-6028(02)02083-6
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
InAs heteroepitaxy on the (2 x 4) and c(4 x 4) reconstructed surfaces of GaAs(0 0 1) has been studied using scanning tunnelling microscopy, with particular emphasis on the formation and evolution of the two-dimensional (2D)InxGa1-xAs wetting layer. The influence of the initial GaAs reconstruction on the growth behaviour is significant for InAs coverages (theta) < 0.8 ML, but both qualitative (surface morphology and reconstruction) and quantitative (step density) surface characteristics converge for theta > I ML. The effects of surface reconstruction are only important for sub-ML InAs coverages, with strain effects dominating at higher coverages. STM topographs indicate a high and rapid disordering of the WL for theta > 0.5 ML, implying that strain-driven alloyed WL formation is important even below theta = I ML. The 2D --> 3D growth mode transition and the formation of self-assembled quantum dots (QDs) is delayed at low As fluxes. In this case strain relief occurs first by a reconstruction change from (I x 3) to a more In-rich (4 x 2) structure, with QD formation taking place only after the deposition of an additional amount of InAs (similar to0.2 ML). (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:8 / 16
页数:9
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