A polymer microdisk photonic sensor integrated onto silicon

被引:74
作者
Cho, Sang-Yeon [1 ]
Jokerst, Nan Marie [1 ]
机构
[1] Duke Univ, Dept Elect & Comp Engn, Durham, NC 27708 USA
关键词
microresonators; microsensors; MICRORING RESONATOR; WAVE-GUIDES; SPECTROSCOPY;
D O I
10.1109/LPT.2006.883210
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Optical sensors are attractive for integrated chip-scale sensor systems. In this letter, integrated microdisk sensors have been fabricated and characterized for five different D-glucose concentrations in deionized water. The microdisk sensor reported is in an orthogonal configuration, reducing the sensor size toward chip-scale sensor applications. The measured wavelength shift in the resonant peak of the microdisk sensors has a linear response as a function of D-glucose concentration. The estimated sensitivity (defined by Delta lambda(resonant)/wt%(D-glucose)) of the fabricated microdisk sensor for the D-glucose solution was 0.12 [nm/wt%] based on the slope of the linear regression line from the measured results.
引用
收藏
页码:2096 / 2098
页数:3
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