Synthesis of randomly oriented carbon nanotubes on SiO2 substrates by thermal chemical vapor deposition toward field electron emitters

被引:23
作者
Honda, S
Baek, YG
Lee, KY
Ikuno, T
Kuzuoka, T
Ryu, JT
Ohkura, S
Katayama, M
Aoki, K
Hirao, T
Oura, K
机构
[1] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan
[2] Taegu Univ, Dept Comp & Commun Engn, Kyungsan 712714, Kyungpook, South Korea
[3] Rodel Nitta Co, Nara 6391032, Japan
[4] Osaka Univ, Grad Sch Engn, Dept Elect Engn, Suita, Osaka 5650871, Japan
关键词
carbon nanotube; thermal chemical vapor deposition; diameter control; SiO2; substrate; field emission;
D O I
10.1016/j.tsf.2004.06.106
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Randomly oriented carbon nanotubes (CNTs) were synthesized directly on SiO2 substrates by thermal chemical vapor deposition (CVD) with C2H4 gas as a carbon source. To control the diameters of the carbon nanotubes, Fe-Ni thin films with different thickness from 80 to 320 nm were deposited as catalysts on SiO2 substrates by magnetron sputtering. The diameter of the resultant carbon nanotubes was dependent on the size of the catalyst particles. Moreover, a small catalyst particle permitted carbon nanotube growth. The resultant randomly oriented carbon nanotubes exhibited good field emission proper-ties. (C) 2004 Elsevier B.V. All rights reserved.
引用
收藏
页码:290 / 294
页数:5
相关论文
共 22 条
[1]   Nucleation and growth of carbon nanotubes by microwave plasma chemical vapor deposition [J].
Bower, C ;
Zhou, O ;
Zhu, W ;
Werder, DJ ;
Jin, SH .
APPLIED PHYSICS LETTERS, 2000, 77 (17) :2767-2769
[2]   Field emission of different oriented carbon nanotubes [J].
Chen, Y ;
Shaw, DT ;
Guo, LP .
APPLIED PHYSICS LETTERS, 2000, 76 (17) :2469-2471
[3]   Growth process conditions of vertically aligned carbon nanotubes using plasma enhanced chemical vapor deposition [J].
Chhowalla, M ;
Teo, KBK ;
Ducati, C ;
Rupesinghe, NL ;
Amaratunga, GAJ ;
Ferrari, AC ;
Roy, D ;
Robertson, J ;
Milne, WI .
JOURNAL OF APPLIED PHYSICS, 2001, 90 (10) :5308-5317
[4]   Effect of carbon nanotube structural parameters on field emission properties [J].
Feng, YT ;
Deng, SZ ;
Chen, J ;
Xu, NS .
ULTRAMICROSCOPY, 2003, 95 (1-4) :93-97
[5]   Observation of charge enhancement induced by graphite atomic vacancy: A comparative STM and AFM study [J].
Hahn, JR ;
Kang, H ;
Song, S ;
Jeon, IC .
PHYSICAL REVIEW B, 1996, 53 (04) :R1725-R1728
[6]   NEW ONE-DIMENSIONAL CONDUCTORS - GRAPHITIC MICROTUBULES [J].
HAMADA, N ;
SAWADA, S ;
OSHIYAMA, A .
PHYSICAL REVIEW LETTERS, 1992, 68 (10) :1579-1581
[7]   Control of molecular excitations in nanotube-heterostructure transistors [J].
Hyldgaard, P .
MATERIALS SCIENCE & ENGINEERING C-BIOMIMETIC AND SUPRAMOLECULAR SYSTEMS, 2003, 23 (1-2) :243-246
[8]   HELICAL MICROTUBULES OF GRAPHITIC CARBON [J].
IIJIMA, S .
NATURE, 1991, 354 (6348) :56-58
[9]   Diameter control of single-walled carbon nanotubes [J].
Kataura, H ;
Kumazawa, Y ;
Maniwa, Y ;
Ohtsuka, Y ;
Sen, R ;
Suzuki, S ;
Achiba, Y .
CARBON, 2000, 38 (11-12) :1691-1697
[10]   Catalytically active nickel {110} surfaces in growth of carbon tubular structures [J].
Kuang, MH ;
Wang, ZL ;
Bai, XD ;
Guo, JD ;
Wang, EG .
APPLIED PHYSICS LETTERS, 2000, 76 (10) :1255-1257