Structures and optical properties of silicon nanocrystallites prepared by pulsed-laser ablation in inert background gas

被引:44
作者
Suzuki, N
Makino, T
Yamada, Y
Yoshida, T
Onari, S
机构
[1] Matsushita Res Inst Tokyo Inc, Tama Ku, Kawasaki, Kanagawa 2148501, Japan
[2] Univ Tsukuba, Inst Appl Phys, Tsukuba, Ibaraki 3058573, Japan
关键词
D O I
10.1063/1.126041
中图分类号
O59 [应用物理学];
学科分类号
摘要
Silicon (Si) nanocrystallites have been synthesized using pulsed-laser ablation in inert background gases, for studying the structures and optical properties as one of the quantum confinement effects. We extracted a process condition where well-dispersed Si nanocrystallites devoid of droplets and debris are prepared, by varying excitation laser conditions. Furthermore, we investigate the influence of the inert background gas pressures on transition from amorphous-like thin films to nanocrystallites. It was clarified that there is a processing window of the inert background gas pressure in which the quantum confinement effects for carriers and phonons become apparent. (C) 2000 American Institute of Physics. [S0003-6951(00)00611-2].
引用
收藏
页码:1389 / 1391
页数:3
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