Microfabrication of oxidation-sharpened silicon tips on silicon nitride cantilevers for atomic force microscopy

被引：35

作者：

Folch, A ^{[1
]}

Wrighton, MS ^{[1
]}

Schmidt, MA ^{[1
]}

机构：

[1] MIT,MICROSYST TECHNOL LAB,CAMBRIDGE,MA 02139

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 1997年 / 6卷 / 04期

基金：

美国国家科学基金会;

关键词：

atomic force microscope; microfabricated cantilevers; microfabricated tips; silicon-on-insulator wafers;

D O I：

10.1109/84.650126

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We have developed a novel process for the microfabrication of atomic force microscope (AFM) cantilevered tips from silicon-on-insulator (SOI) wafers, The tip and cantilever are made of crystalline silicon and low-stress silicon nitride, respectively, This choice of materials allows us to sharpen the tips by oxidation sharpening without affecting the cantilever, We evaluated their performance in contact mode during imaging of artificial nanostructures and compared them to commercially available ones, The images acquired with our tips feature superior resolution on those samples.

引用

页码：303 / 306

页数：4

共 14 条

[1] ALAMARIU B, COMMUNICATION
[2] MICROFABRICATION OF CANTILEVER STYLI FOR THE ATOMIC FORCE MICROSCOPE
ALBRECHT, TR
AKAMINE, S
CARVER, TE
QUATE, CF
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (04): : 3386 - 3396
[3] ATOMIC FORCE MICROSCOPE
BINNIG, G
QUATE, CF
GERBER, C
[J]. PHYSICAL REVIEW LETTERS, 1986, 56 (09) : 930 - 933
[4] AFM probes with directly fabricated tips
Boisen, A
Hansen, O
Bouwstra, S
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1996, 6 (01) : 58 - 62
[5] SILICON CANTILEVERS AND TIPS FOR SCANNING FORCE MICROSCOPY
BRUGGER, J
BUSER, RA
DEROOIJ, NF
[J]. SENSORS AND ACTUATORS A-PHYSICAL, 1992, 34 (03) : 193 - 200
[6] Israelachvili J., 1985, Intermolecular and Surface Forces
[7] FABRICATION OF AN ULTRASHARP AND HIGH-ASPECT-RATIO MICROPROBE WITH A SILICON-ON-INSULATOR WAFER FOR SCANNING FORCE MICROSCOPY
ITOH, J
TOHMA, Y
KANEMARU, S
SHIMIZU, K
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (02): : 331 - 334
[8] FORMATION OF SILICON TIPS WITH LESS-THAN-1 NM RADIUS
MARCUS, RB
RAVI, TS
GMITTER, T
CHIN, K
LIU, D
ORVIS, WJ
CIARLO, DR
HUNT, CE
TRUJILLO, J
[J]. APPLIED PHYSICS LETTERS, 1990, 56 (03) : 236 - 238
[9] SILICON AS A MECHANICAL MATERIAL
PETERSEN, KE
[J]. PROCEEDINGS OF THE IEEE, 1982, 70 (05) : 420 - 457
[10] OXIDATION SHARPENING OF SILICON TIPS
RAVI, TS
MARCUS, RB
LIU, D
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 2733 - 2737

← 1 2 →