Rapid prototyping of polymer microsystems via excimer laser ablation of polymeric moulds

被引:32
作者
Jensen, MF
McCormack, JE
Helbo, B
Christensen, LH
Christensen, TR
Geschke, O
机构
[1] Danish Technol Inst, Ctr Microtechnol & Surface Anal, DK-2630 Taastrup, Denmark
[2] Danish Technol Inst, Ctr Plast Technol, DK-2630 Taastrup, Denmark
[3] Tech Univ Denmark, MIC Dept Micro & Nano Technol, DK-2800 Lyngby, Denmark
来源
LAB ON A CHIP | 2004年 / 4卷 / 04期
关键词
D O I
10.1039/b403037k
中图分类号
Q5 [生物化学];
学科分类号
071010 ; 081704 ;
摘要
This study presents a novel method for rapid prototyping of polymer microsystems. The method is based on excimer laser ablation of a thermally and mechanically stable polymer, such as PEEK (poly-ether-ether-ketone). A negative of the desired microsystem is laser machined in PEEK, which can then be used directly for hot embossing or injection moulding of a series of prototypes. This approach is very rapid and considerably cheaper than more traditional approaches to toolmaking, while still performing well in terms of reproduction of tool dimensions. The reduction in time and cost for a master tool using this method opens up new possibilities for testing small series in the R&D phase of a microsystem. Finally, two particular applications of the technique are presented.
引用
收藏
页码:391 / 395
页数:5
相关论文
共 21 条
[11]   Review on micro molding of thermoplastic polymers [J].
Heckele, M ;
Schomburg, WK .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (03) :R1-R14
[12]  
HOLMES AS, 2001, LASER FABRICATION AS
[13]  
JENSEN MF, 2003, P CIRP SEM MICR NAN
[14]  
JENSEN MF, 2003, IMPROVED FABRICATION
[15]   Excimer laser machining of corner cube structures [J].
Jolic, KI ;
Ghantasala, MK ;
Harvey, EC .
JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (03) :388-397
[16]  
JONES P, 2000, Patent No. 0060352
[17]   CO2-laser micromachining and back-end processing for rapid production of PMMA-based microfluidic systems [J].
Klank, H ;
Kutter, JP ;
Geschke, O .
LAB ON A CHIP, 2002, 2 (04) :242-246
[18]   Polymer microsystems by excimer laser ablation:: From rapid prototyping to large number fabrication [J].
Klotzbücher, T ;
Braune, T ;
Sigloch, S ;
Hossfeld, J ;
Neumeier, M ;
Bauer, HD ;
Ehrfeld, W .
LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING VI, 2001, 4274 :307-315
[19]  
Lawes R. A., 1996, Microsystem Technologies, V3, P17, DOI 10.1007/s005420050048
[20]   Rapid fabrication of microcomponents - UV-laser assisted prototyping, laser micro-machining of mold inserts and replication via photomolding [J].
Pfleging, W ;
Bernauer, W ;
Hanemann, T ;
Torge, M .
MICROSYSTEM TECHNOLOGIES, 2002, 9 (1-2) :67-74