Physical origins of mobility degradation in extremely scaled SiO2/HfO2 gate stacks with La and Al induced dipoles
被引:63
作者:
Ando, Takashi
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机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, JapanIBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
Ando, Takashi
[1
,2
]
Copel, Matt
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAIBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
Copel, Matt
[1
]
Bruley, John
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h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAIBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
Bruley, John
[1
]
Frank, Martin M.
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h-index: 0
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IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAIBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
Frank, Martin M.
[1
]
Watanabe, Heiji
论文数: 0引用数: 0
h-index: 0
机构:
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, JapanIBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
Watanabe, Heiji
[2
]
Narayanan, Vijay
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h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAIBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
Narayanan, Vijay
[1
]
机构:
[1] IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USA
[2] Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
aluminium;
electron mobility;
hafnium compounds;
high-k dielectric thin films;
lanthanum;
metal-insulator boundaries;
MOS capacitors;
silicon compounds;
D O I:
10.1063/1.3373914
中图分类号:
O59 [应用物理学];
学科分类号:
摘要:
We demonstrate metal-gate-induced interfacial layer (IL) scaling using a HfO2 dielectric and clarify the kinetics underlying this process. The intrinsic IL scaling effect on electron mobility is separated from La and Al-induced dipole effects. We find that the mobility degradation for La-containing high-kappa dielectrics is not due to the La-induced dipole but due to the intrinsic IL scaling effect, whereas the Al-induced dipole brings about additional mobility degradation. This unique nature of the La-induced dipole enables aggressive equivalent oxide thickness scaling down to 0.42 nm without extrinsic mobility degradation when combined with IL scaling.
机构:
Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Ando, Takashi
;
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h-index:
机构:
Shimura, Takayoshi
;
Watanabe, Heiji
论文数: 0引用数: 0
h-index: 0
机构:
Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Watanabe, Heiji
;
Hirano, Tomoyuki
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Hirano, Tomoyuki
;
Yoshida, Shinichi
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Yoshida, Shinichi
;
Tai, Kaori
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Tai, Kaori
;
Yamaguchi, Shinpei
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h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Yamaguchi, Shinpei
;
Iwamoto, Hayato
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Iwamoto, Hayato
;
Kadomura, Shingo
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Kadomura, Shingo
;
Toyoda, Satoshi
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tokyo, Grad Sch Engn, Dept Appl Chem, Bunkyo Ku, Tokyo 1138656, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Toyoda, Satoshi
;
Kumigashira, Hiroshi
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tokyo, Grad Sch Engn, Dept Appl Chem, Bunkyo Ku, Tokyo 1138656, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Kumigashira, Hiroshi
;
Oshima, Masaharu
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tokyo, Grad Sch Engn, Dept Appl Chem, Bunkyo Ku, Tokyo 1138656, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
机构:
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Arimura, Hiroaki
;
Haight, Richard
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Haight, Richard
;
Brown, Stephen L.
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Brown, Stephen L.
;
Kellock, Andrew
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Kellock, Andrew
;
Callegari, Alessandro
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Callegari, Alessandro
;
Copel, Matthew
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Copel, Matthew
;
Watanabe, Heiji
论文数: 0引用数: 0
h-index: 0
机构:
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Watanabe, Heiji
;
Narayanan, Vijay
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Narayanan, Vijay
;
Ando, Takashi
论文数: 0引用数: 0
h-index: 0
机构:
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
机构:
IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USAIBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA
Copel, M
;
Cartier, E
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USAIBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA
Cartier, E
;
Ross, FM
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h-index: 0
机构:
IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USAIBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA
机构:
Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Ando, Takashi
;
论文数: 引用数:
h-index:
机构:
Shimura, Takayoshi
;
Watanabe, Heiji
论文数: 0引用数: 0
h-index: 0
机构:
Osaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Watanabe, Heiji
;
Hirano, Tomoyuki
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Hirano, Tomoyuki
;
Yoshida, Shinichi
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Yoshida, Shinichi
;
Tai, Kaori
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Tai, Kaori
;
Yamaguchi, Shinpei
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Yamaguchi, Shinpei
;
Iwamoto, Hayato
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Iwamoto, Hayato
;
Kadomura, Shingo
论文数: 0引用数: 0
h-index: 0
机构:
Sony Corp, Semicond Business Grp, Semicond Technol Dev Div, Kanagawa 2430014, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Kadomura, Shingo
;
Toyoda, Satoshi
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tokyo, Grad Sch Engn, Dept Appl Chem, Bunkyo Ku, Tokyo 1138656, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Toyoda, Satoshi
;
Kumigashira, Hiroshi
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tokyo, Grad Sch Engn, Dept Appl Chem, Bunkyo Ku, Tokyo 1138656, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
Kumigashira, Hiroshi
;
Oshima, Masaharu
论文数: 0引用数: 0
h-index: 0
机构:
Univ Tokyo, Grad Sch Engn, Dept Appl Chem, Bunkyo Ku, Tokyo 1138656, JapanOsaka Univ, Grad Sch Engn, Dept Mat & Life Sci, Suita, Osaka 5650871, Japan
机构:
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Arimura, Hiroaki
;
Haight, Richard
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Haight, Richard
;
Brown, Stephen L.
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Brown, Stephen L.
;
Kellock, Andrew
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, Almaden Res Ctr, San Jose, CA 95120 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Kellock, Andrew
;
Callegari, Alessandro
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Callegari, Alessandro
;
Copel, Matthew
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Copel, Matthew
;
Watanabe, Heiji
论文数: 0引用数: 0
h-index: 0
机构:
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, JapanOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Watanabe, Heiji
;
Narayanan, Vijay
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
Narayanan, Vijay
;
Ando, Takashi
论文数: 0引用数: 0
h-index: 0
机构:
Osaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
IBM Corp, TJ Watson Res Ctr, Yorktown Hts, NY 10598 USAOsaka Univ, Grad Sch Engn, Suita, Osaka 5650871, Japan
机构:
IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USAIBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA
Copel, M
;
Cartier, E
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USAIBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA
Cartier, E
;
Ross, FM
论文数: 0引用数: 0
h-index: 0
机构:
IBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USAIBM Corp, Div Res, Thomas J Watson Res Ctr, Yorktown Heights, NY 10598 USA