Electrical contrast observations and voltage measurements by Kelvin probe force gradient microscopy

被引：37

作者：

Girard, P

Ramonda, M

Saluel, D

机构：

[1] Univ Montpellier 2, LAIN, UMR CNRS 5011, F-34095 Montpellier 5, France

[2] Univ Montpellier 2, LMCP, F-34095 Montpellier, France

[3] CEA Grenoble, LETI, F-38054 Grenoble 09, France

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2002年 / 20卷 / 04期

关键词：

D O I：

10.1116/1.1490387

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Kelvin probe force gradient microscopy is proposed to image and measure local dc voltage variations using the double pass method. The various voltages between sensor and sample induce electrical force gradients that change the resonance of the sensor. Images of the various phase shifts show contrasts, which, as we demonstrate, can be interpreted in terms of local changes in voltage and capacitive coupling. The interest of this method for observation and local voltage measurements is demonstrated and explained. (C) 2002 American Vacuum Society.

引用

页码：1348 / 1355

页数：8

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