High quality zinc oxide films by pulsed laser ablation

被引：74

作者：

Narasimhan, KL

Pai, SP

Palkar, VR

Pinto, R

机构：

[1] Tata Inst. of Fundamental Research, Colaba

来源：

THIN SOLID FILMS | 1997年 / 295卷 / 1-2期

关键词：

ZnO; electrical properties; structural properties; optical properties;

D O I：

10.1016/S0040-6090(96)09157-2

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We have investigated the structural, electrical and optical properties of thin films of zinc oxide deposited by laser ablation. We find that even at room temperature the films are c-axis oriented on both crystalline and amorphous substrates. The electrical de resistivity is independent of substrate temperature and is about 2-3 m Omega cm(-1). The films have low absorption coefficient in the visible part of the spectrum and represent some of the best ZnO films deposited at low temperature. (C) 1997 Elsevier Science S.A.

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页码：104 / 106

页数：3

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