Calibration improvement of Fourier transform infrared phase-modulated ellipsometry

被引：4

作者：

Canillas, A

Pascual, E

Bertran, E

机构：

[1] Departament de Física Aplicada i Electrónica, Universitat de Barcelona, Barcelona, E08028, Avinguda Diagonal

来源：

JOURNAL OF THE OPTICAL SOCIETY OF AMERICA A-OPTICS IMAGE SCIENCE AND VISION | 1996年 / 13卷 / 12期

关键词：

D O I：

10.1364/JOSAA.13.002461

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

An improved self-consistent calibration procedure has been developed for FTIR phase-modulated ellipsometers. The new calibration method basically considers the effect of multiple reflections between the modulator faces in the intensity detected. The alignment, orientation, and calibration procedures are described in detail. The use of extra polarizers or analyzers is also discussed. The new calibration method removes the Bessel function background with an accuracy better than 0.5% in the wave-number range from 1000 to 4000 cm(-1). The examples provided illustrate the accuracy in the measurement of Psi and Delta angles, which turns out to be less than 1 degrees on average. (C) 1996 Optical Society of America.

引用

页码：2461 / 2467

页数：7

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