An efficient low voltage, high frequency silicon CMOS light emitting device and electro-optical interface

被引:66
作者
Snyman, LW [1 ]
du Plessis, M
Seevinck, E
Aharoni, H
机构
[1] Univ Pretoria, Dept Elect & Elect Engn, Carl & Emily Fuchs Inst Microelect, ZA-0002 Pretoria, South Africa
[2] Ben Gurion Univ Negev, Dept Elect & Comp Engn, IL-84105 Beer Sheva, Israel
关键词
integrated circuit manufacture; integrated curcuit optoelectronics; light emitting diodes; SiCMOS technology;
D O I
10.1109/55.806102
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A silicon light emitting device was designed and realized utilizing a standard 2-mu m industrial CMOS technology design and processing procedure. The device and its associated driving circuitry were integrated in a CMOS integrated circuit and can interface with a multimode optical fiber. The device delivers 8 nW of optical power (450-850 nm wavelength) per 20-mu m diameter of chip area at 4.0 V and 5 mA. The device emits light by means of a surface assisted Zener breakdown process that occurs laterally between concentrically arranged highly doped n(+) rings and a pf centroid, which are all coplanarly arranged with an optically transparent Si-SiO2 interface, Theoretical and experimental determinations with capacitances and series resistances indicate that the device has an intrinsic high-frequency operating capability into the near gigahertz range.
引用
收藏
页码:614 / 617
页数:4
相关论文
共 18 条
[1]  
BARIBEAU JM, 1996, IEEE LEOS NEWSLETTER, V10
[2]   HOT-CARRIER LUMINESCENCE IN SI [J].
BUDE, J ;
SANO, N ;
YOSHII, A .
PHYSICAL REVIEW B, 1992, 45 (11) :5848-5856
[3]   ENHANCEMENT AND SUPPRESSION OF THE FORMATION OF POROUS SILICON [J].
DUTTAGUPTA, SP ;
PENG, C ;
FAUCHET, PM ;
KURINEC, SK ;
BLANTON, TN .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (03) :1230-1235
[4]   Silicon-based microphotonics and integrated optoelectronics [J].
Fitzgerald, EA ;
Kimerling, LC .
MRS BULLETIN, 1998, 23 (04) :39-47
[5]  
GHYNOWETH AG, 1956, PHYS REV, P369
[6]  
HABERMEIER HU, 1998, MRS BULL, V23, P13
[7]   Silicon-based visible light-emitting devices integrated into microelectronic circuits [J].
Hirschman, KD ;
Tsybeskov, L ;
Duttagupta, SP ;
Fauchet, PM .
NATURE, 1996, 384 (6607) :338-341
[8]   LIGHT-EMITTING DEVICES IN INDUSTRIAL CMOS TECHNOLOGY [J].
KRAMER, J ;
SEITZ, P ;
STEIGMEIER, EF ;
AUDERSET, H ;
DELLEY, B ;
BALTES, H .
SENSORS AND ACTUATORS A-PHYSICAL, 1993, 37-8 :527-533
[9]   ON THE BREMSSTRAHLUNG ORIGIN OF HOT-CARRIER-INDUCED PHOTONS IN SILICON DEVICES [J].
LACAITA, AL ;
ZAPPA, F ;
BIGLIARDI, S ;
MANFREDI, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 1993, 40 (03) :577-582
[10]  
LOCKWOOD DJ, 1998, SEMICOND SEMIMET, V40