HOT-CARRIER LUMINESCENCE IN SI

被引:216
作者
BUDE, J [1 ]
SANO, N [1 ]
YOSHII, A [1 ]
机构
[1] NIPPON TELEGRAPH & TEL PUBL CORP, LSI LABS, ATSUGI, KANAGAWA 24301, JAPAN
来源
PHYSICAL REVIEW B | 1992年 / 45卷 / 11期
关键词
D O I
10.1103/PhysRevB.45.5848
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
There has been a renewed interest in the spectra of emitted light from Si metal-oxide-semiconductor field-effect transistors (MOSFET's) in the belief that a better understanding of this phenomenon will lead to a deeper understanding of hot carriers in these devices. In this paper, we attempt to explain the physical mechanisms responsible for the light emission in Si under varying doping and carrier conditions and as a function of hot-carrier distribution functions. Based on this study, we have found that a proper inclusion of a realistic band structure is essential for the study of hot-carrier luminescence in Si. Furthermore, by including these band-structure effects, we conclude that the dominant light-emission mechanism in normally biased Si MOSFET's is a combination of direct and phonon-assisted inter-conduction-band radiation.
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页码:5848 / 5856
页数:9
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