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SAW-based gas sensors with rf sputtered InOx and PECVD SiNx films:: Response to H2 and O3 gases

被引：22
作者：
Fechete, A. C.
Wlodarski, W.
Kalantar-Zadeh, K.
Holland, A. S.
Antoszewski, J.
Kaciulis, S.
Pandolfi, L.
机构：
[1] RMIT Univ, Sensor Technol Lab, Sch Elect & Comp Engn, Melbourne, Vic 3001, Australia
[2] Univ Western Australia, Microelect Res Grp, Sch Elect Elect & Comp Engn, Nedlands, WA 6009, Australia
[3] CNR, ISMN, I-00016 Monterotondo, RM, Italy
来源：
SENSORS AND ACTUATORS B-CHEMICAL | 2006年 / 118卷 / 1-2期
关键词：
SAW gas sensor; PECVD; SiNx; ozone; hydrogen;
D O I：
10.1016/j.snb.2006.04.082
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
Surface acoustic wave (SAW)-based sensors, with InOx and SiNx layers on 36 degrees YX LiTaO3 substrates were investigated for the detection of hydrogen (H-2) and ozone (O-3) gases at different operating temperatures. SiNx films with different thicknesses were deposited using the plasma enhanced chemical vapour deposition (PECVD) method. The InOx sensing layer was deposited using an rf magnetron sputterer. The sensors' performance was analyzed in terms of their frequency shifts as a function of different gas concentrations. The chemical-physical characterization of the deposited films was carried out by X-ray photoelectron spectroscopy (XPS). High sensitivities and excellent repeatabilities were observed towards both gases. (c) 2006 Elsevier B.V. All rights reserved.
引用
收藏
页码：362 / 367
页数：6
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