Ellipsometric microscopy

被引：24

作者：

Neumaier, KR ^{[1
]}

Elender, G ^{[1
]}

Sackmann, E ^{[1
]}

Merkel, R ^{[1
]}

机构：

[1] Tech Univ Munich, Lehrstuhl Biophys, D-85748 Garching, Germany

来源：

EUROPHYSICS LETTERS | 2000年 / 49卷 / 01期

关键词：

D O I：

10.1209/epl/i2000-00113-x

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

We modified an optical microscope to enable quantitative ellipsometric studies with I nm height and 0.9 mu m lateral resolution. A beam of polarised light impinging on the object under a shallow angle of incidence is generated by focusing a pinhole into an off-axis point in the back focal plane of a high-power microscope objective. The entire image of the object is focused which greatly reduces stray light. In addition, this enables a drastic reduction of the measuring time. For thicknesses of organic films exceeding 20 nm both the film thickness and its refractive index may be determined simultaneously.

引用

页码：14 / 19

页数：6

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