Some properties of TiO2-layers prepared by mid-frequency and dc reactive magnetron sputtering

Thin TiO2-films (thickness about 500 nm) on glass substrates were prepared by sputtering using a conventional dc-magnetron and a mid-frequency (MF)-powered double magnetron (commercially known as TwinMag). The optical and structural properties were examined. DC sputtered films show the well known columnar structure often encountered in thin films while twin magnetron sputtered films have a denser structure and a smoother surface. X-ray diffraction showed;ed that films prepared by the de method have the anatase structure, while layers obtained by twin magnetron also have the rutile structure. For twin magnetron prepared films obtained at very high deposition rates a larger index of refraction was measured compared to the de-case. (C) 1997 Elsevier Science B.V.