[1] Zhejiang Univ, Dept Mat Sci & Engn, State Key Lab Silicon Mat, Hangzhou 310028, Zhejiang, Peoples R China
[2] Tsinghua Univ, Dept Engn Mech, Appl Mech Lab, Beijing 100084, Peoples R China
[3] Tsinghua Univ, Ctr Nano & Micro Mech, Beijing 100084, Peoples R China