AlN/GaN double-barrier resonant tunneling diodes grown by rf-plasma-assisted molecular-beam epitaxy

被引:110
作者
Kikuchi, A
Bannai, R
Kishino, K
Lee, CM
Chyi, JI
机构
[1] Sophia Univ, Dept Elect & Elect Engn, Chiyoda Ku, Tokyo 1028554, Japan
[2] Natl Cent Univ, Dept Elect Engn, Chungli 32054, Taiwan
关键词
D O I
10.1063/1.1501157
中图分类号
O59 [应用物理学];
学科分类号
摘要
AlN/GaN double-barrier resonant tunneling diodes (DB-RTDs) were fabricated on (0001) Al2O3 substrates by molecular-beam epitaxy, using a rf-plasma nitrogen source. The AlN/GaN DB-RTDs were designed to have a 3-ML-thick GaN quantum well and 4-ML-thick AlN barrier layers sandwiched by Si-doped n-type GaN contact layers. The current-voltage characteristics of mesa diode samples showed clear negative differential resistance (NDR) at room temperature. The NDR was observed at 2.4 V with a peak current of 2.9 mA, which corresponds to 180 A/cm(2). A peak-to-valley current ratio as high as 32 was obtained. (C) 2002 American Institute of Physics.
引用
收藏
页码:1729 / 1731
页数:3
相关论文
共 17 条
[1]   OSCILLATIONS UP TO 712 GHZ IN INAS/ALSB RESONANT-TUNNELING DIODES [J].
BROWN, ER ;
SODERSTROM, JR ;
PARKER, CD ;
MAHONEY, LJ ;
MOLVAR, KM ;
MCGILL, TC .
APPLIED PHYSICS LETTERS, 1991, 58 (20) :2291-2293
[2]   RESONANT TUNNELING IN SEMICONDUCTOR DOUBLE BARRIERS [J].
CHANG, LL ;
ESAKI, L ;
TSU, R .
APPLIED PHYSICS LETTERS, 1974, 24 (12) :593-595
[3]   High electron mobility in AlGaN/GaN heterostructures grown on bulk GaN substrates [J].
Frayssinet, E ;
Knap, W ;
Lorenzini, P ;
Grandjean, N ;
Massies, J ;
Skierbiszewski, C ;
Suski, T ;
Grzegory, I ;
Porowski, S ;
Simin, G ;
Hu, X ;
Khan, MA ;
Shur, MS ;
Gaska, R ;
Maude, D .
APPLIED PHYSICS LETTERS, 2000, 77 (16) :2551-2553
[4]   Intersubband absorption in degenerately doped GaN/AlxGa1-xN coupled double quantum wells [J].
Gmachl, C ;
Ng, HM ;
Cho, AY .
APPLIED PHYSICS LETTERS, 2001, 79 (11) :1590-1592
[5]  
IIZUKA N, 2002, 5 INT S CONT PHOT TE
[6]   ELECTRON RESONANT TUNNELING IN SI/SIGE DOUBLE BARRIER DIODES [J].
ISMAIL, K ;
MEYERSON, BS ;
WANG, PJ .
APPLIED PHYSICS LETTERS, 1991, 59 (08) :973-975
[7]   Improvement of crystal quality of rf-plasma-assisted molecular beam epitaxy grown Ga-polarity GaN by high-temperature grown AlN multiple intermediate layers [J].
Kikuchi, A ;
Yamada, T ;
Nakamura, S ;
Kusakabe, K ;
Sugihara, D ;
Kishino, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 2000, 39 (4B) :L330-L333
[8]   Improvement of electrical property and surface morphology of GaN grown by RF-plasma assisted molecular beam epitaxy by introduction of multiple AlN intermediate layer [J].
Kikuchi, A ;
Yamada, T ;
Nakamura, S ;
Kusakabe, K ;
Sugihara, D ;
Kishino, K .
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 82 (1-3) :12-15
[9]  
KISHINO K, IN PRESS APPL PHYS L
[10]  
KISHINO K, 2001, 2001 MARS FALL M BOS