Microstructural, thermal and mechanical behavior of co-sputtered binary Zr-Cu thin film metallic glasses

被引:61
作者
Apreutesei, M. [1 ]
Steyer, P. [1 ]
Joly-Pottuz, L. [1 ]
Billard, A. [2 ]
Qiao, J. [1 ]
Cardinal, S. [1 ]
Sanchette, F. [3 ]
Pelletier, J. M. [1 ]
Esnouf, C. [1 ]
机构
[1] INSA Lyon, MATEIS Lab, F-69621 Villeurbanne, France
[2] UTBM, LERMPS, F-90010 Belfort, France
[3] CNRS, UMR 6279, LASMIS, UTT, F-10004 Troyes, France
关键词
Thin film metallic glasses; Magnetron sputtering; In situ X-ray diffraction; Thermal stability; Microstructure; Mechanical properties; ELASTIC-MODULUS; HARDNESS; ALLOYS;
D O I
10.1016/j.tsf.2013.05.177
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Bulk metallic glasses have attracted considerable attention over the last decades for their outstanding mechanical features (high strength, super-elasticity) and physico-chemical properties (corrosion resistance). Recently, some attempts to assign such original behavior from bulk materials to modified surfaces have been reported in the literature based on multicomponent alloys. In this paper we focused on the opportunity to form a metallic glass coating from the binary Zr-Cu system using a magnetron co-sputtering physical vapor deposition process. The composition of the films can be easily controlled by the relative intensities applied to both pure targets, which made possible the study of the whole Zr-Cu system (from 13.4 to 85.0 at.% Cu). The chemical composition of the films was obtained by energy dispersive X-ray spectroscopy, and their microstructure was characterized by scanning and transmission electron microscopy. The thermal stability of the films was deduced from an in situ X-ray diffraction analysis (from room temperature up to 600 degrees C) and correlated with the results of the differential scanning calorimetry technique. Their mechanical properties were determined by nanoindentation experiments. (C) 2013 Elsevier B.V. All rights reserved.
引用
收藏
页码:53 / 59
页数:7
相关论文
共 26 条
[1]   On the deposition mechanisms and the formation of glassy Cu-Zr thin films [J].
Almyras, G. A. ;
Matenoglou, G. M. ;
Komninou, Ph. ;
Kosmidis, C. ;
Patsalas, P. ;
Evangelakis, G. A. .
JOURNAL OF APPLIED PHYSICS, 2010, 107 (08)
[2]   On the amorphous and nanocrystalline Zr-Cu and Zr-Ti co-sputtered thin films [J].
Chen, C. J. ;
Huang, J. C. ;
Chou, H. S. ;
Lai, Y. H. ;
Chang, L. W. ;
Du, X. H. ;
Chu, J. P. ;
Nieh, T. G. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 483 (1-2) :337-340
[3]   Enhanced mechanical properties of multilayered micropillars of amorphous ZrCuTi and nanocrystalline Ta layers [J].
Chou, H. S. ;
Du, X. H. ;
Lee, C. J. ;
Huang, J. C. .
INTERMETALLICS, 2011, 19 (07) :1047-1051
[4]   Mechanical properties of ZrCuTi thin film metallic glass with high content of immiscible tantalum [J].
Chou, H. S. ;
Huang, J. C. ;
Chang, L. W. .
SURFACE & COATINGS TECHNOLOGY, 2010, 205 (02) :587-590
[5]   Amorphous and nanocrystalline sputtered Mg-Cu thin films [J].
Chou, H. S. ;
Huang, J. C. ;
Lai, Y. H. ;
Chang, L. W. ;
Du, X. H. ;
Chu, J. P. ;
Nieh, T. G. .
JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 483 (1-2) :341-345
[6]   Structural relaxation and nanoindentation response in Zr-Cu-Ti amorphous thin films [J].
Chou, H. S. ;
Huang, J. C. ;
Chang, L. W. ;
Nieh, T. G. .
APPLIED PHYSICS LETTERS, 2008, 93 (19)
[7]   Thin film metallic glasses: Preparations, properties, and applications [J].
Chu, J. P. ;
Huang, J. C. ;
Jang, J. S. C. ;
Wang, Y. C. ;
Liaw, P. K. .
JOM, 2010, 62 (04) :19-24
[8]   Thin film metallic glasses: Unique properties and potential applications [J].
Chu, Jinn P. ;
Jang, J. S. C. ;
Huang, J. C. ;
Chou, H. S. ;
Yang, Y. ;
Ye, J. C. ;
Wang, Y. C. ;
Lee, J. W. ;
Liu, F. X. ;
Liaw, P. K. ;
Chen, Y. C. ;
Lee, C. M. ;
Li, C. L. ;
Rullyani, Cut .
THIN SOLID FILMS, 2012, 520 (16) :5097-5122
[9]   On the elastic modulus and hardness of co-sputtered Zr-Cu-(N) thin metal glass films [J].
Coddet, P. ;
Sanchette, F. ;
Rousset, J. C. ;
Rapaud, O. ;
Coddet, C. .
SURFACE & COATINGS TECHNOLOGY, 2012, 206 (17) :3567-3571
[10]  
DAL FH, 2008, ACTA MAT, V56, P4635