Design and optimization of an ultrasonic flexural plate wave micropump using numerical simulation

被引：84

作者：

Nguyen, NT

White, RM

机构：

[1] Nanyang Technol Univ, Sch Mech & Prod Engn, Nanyang 639798, Singapore

[2] Univ Calif Berkeley, Berkeley Sensor & Actuator Ctr, EECS, Berkeley, CA 94720 USA

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 1999年 / 77卷 / 03期

关键词：

micropump; microfluidics; acoustic streaming;

D O I：

10.1016/S0924-4247(99)00216-2

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper presents design issues and a numerical model of a micromachined pump based on acoustic streaming in water. Influences of channel height, wave amplitude, and backpressure on the velocity profile and flow rate are investigated. Using these results, design rules for the acoustic micropump are derived. Thermal transport effects of the acoustic streaming are also discussed in order to integrate a thermal flow sensor into the pump or to apply the pump for cooling purposes. (C) 1999 Elsevier Science S.A. All rights reserved.

引用

页码：229 / 236

页数：8

共 10 条

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BRADLEY CE, 1994, P IEEE ULTR S, P593

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