Orientation effects in chemical solution derived Pb(Zr0.3,Ti0.7)O3 thin films on ferroelectric properties

The solely orientation-related effects on ferroelectric and piezoelectric properties of Pb(Zr-0.3,Ti-0.7)O-3 (PZT) thin films with identical processing conditions were investigated using near lattice matched Pt electrodes, that is, (1 1 1)-textured Pt for (1 1 1)-oriented PZT thin films and (100)-textured Pt for (100)-oriented films. As a result, the film composition, microstructure, and topography were highly similar in all cases. (1 1 1)-oriented tetragonal PZT films exhibited highly rectangular P-V hysteresis loops with a slightly better fatigue endurance than the (1 0 0)-oriented films. However, the measured d(33) values of (1 0 0)-oriented PZT films were somewhat higher than those of (1 1 1)-oriented films, indicating a consistency with C-V curves. It was shown that in tetragonal symmetry, the intrinsic effect was largest in the piezoelectricity of PZT thin films. (C) 2002 Elsevier Science B.V. All rights reserved.