Electrical and optical properties of thin films prepared by spin coating a dispersion of nano-sized tin-doped indium oxide particles

被引：17

作者：

Ederth, J

Hultåker, A

Heszler, P

Niklasson, GA

Granqvist, CG

van Doorn, A

van Haag, C

Jongerius, MJ

Burgard, D

机构：

[1] Uppsala Univ, Angstrom Lab, Dept Mat Sci, SE-75121 Uppsala, Sweden

[2] Philips CFT, Eindhoven, Netherlands

[3] Nanogate GmbH, Saarbrucken, Germany

[4] Hungarian Acad Sci, Res Grp Laser Phys, H-6701 Szeged, Hungary

来源：

SMART MATERIALS & STRUCTURES | 2002年 / 11卷 / 05期

关键词：

Annealing - Dispersions - Doping (additives) - Electric conductivity - Indium compounds - Light absorption - Nanostructured materials - Spin coating - Tin - Vacuum applications - X ray diffraction analysis;

D O I：

10.1088/0964-1726/11/5/308

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Thin films were made by spinning a dispersion of tin-doped indium oxide particles, having an average diameter of 14 nm, onto glass substrates. As-deposited thin films displayed a resistivity rho of 0.3 Omega m and some optical absorption. Annealing in vacuum at 200-400degreesC for 2 h, and subsequently in air at 500degreesC for 2 h, produced films with rho approximate to 10(-3) Omega m and a visible transmittance exceeding 90%. Leaving Out the vacuum treatment yielded higher resistivity.

引用

页码：675 / 678

页数：4

共 12 条

[1] Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process [J].

Alam, MJ ;

Cameron, DC .

THIN SOLID FILMS, 2000, 377 :455-459

[2] SOL-GEL DERIVED TRANSPARENT IR-REFLECTING ITO SEMICONDUCTOR COATINGS AND FUTURE APPLICATIONS [J].

ARFSTEN, NJ .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1984, 63 (1-2) :243-249

[3] Effects of heat treatment on the microstructure of nanophase indium-tin oxide [J].

Gao, Z ;

Gao, YZ ;

Li, YH ;

Li, L .

NANOSTRUCTURED MATERIALS, 1999, 11 (05) :611-616

[4] Criteria for choosing transparent conductors [J].

Gordon, RG .

MRS BULLETIN, 2000, 25 (08) :52-57

[5] EVAPORATED SN-DOPED IN2O3 FILMS - BASIC OPTICAL-PROPERTIES AND APPLICATIONS TO ENERGY-EFFICIENT WINDOWS [J].

HAMBERG, I ;

GRANQVIST, CG .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (11) :R123-R159

[6]

Liu J, 1999, PHYS CHEM GLASSES, V40, P277

[7] SOL-GEL DERIVED, AIR-BAKED INDIUM AND TIN OXIDE-FILMS [J].

MATTOX, DM .

THIN SOLID FILMS, 1991, 204 (01) :25-32

[8] SINTERING AND ELECTRICAL-PROPERTIES OF TITANIA-CONTAINING AND ZIRCONIA-CONTAINING IN2O3-SNO2 (ITO) CERAMICS [J].

NADAUD, N ;

NANOT, M ;

BOCH, P .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (03) :843-846

[9] Electronic transport in tin-doped indium oxide thin films prepared by sol-gel technique [J].

Bel, Hadj Tahar, Radhouane ;

Ban, Takayuki ;

Ohya, Yutaka ;

Takahashi, Yasutaka .

1998, (83)

[10]

TONEY MF, 1992, ENCY MAT CHARACTERIZ, P208

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