Demonstration of 12 nm Resolution Fresnel Zone Plate Lens based Soft X-ray Microscopy

被引：220

作者：

Chao, Weilun ^{[1
]}

Kim, Jihoon ^{[2
]}

Rekawa, Senajith ^{[1
]}

Fischer, Peter ^{[1
]}

Anderson, Erik H. ^{[1
]}

机构：

[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Ctr Xray Opt, Berkeley, CA 94720 USA

[2] Univ Calif Berkeley, NSF ERC Extreme Ultraviolet Sci & Technol, Berkeley, CA 94720 USA

来源：

OPTICS EXPRESS | 2009年 / 17卷 / 20期

基金：

美国国家科学基金会;

关键词：

HOLOGRAPHY;

D O I：

10.1364/OE.17.017669

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

To extend soft x-ray microscopy to a resolution of order 10 nm or better, we developed a new nanofabrication process for Fresnel zone plate lenses. The new process, based on the double patterning technique, has enabled us to fabricate high quality gold zone plates with 12 nm outer zones. Testing of the zone plate with the full-field transmission x-ray microscope, XM-1, in Berkeley, showed that the lens clearly resolved 12 nm lines and spaces. This result represents a significant step towards 10 nm resolution and beyond. (C) 2009 Optical Society of America

引用

页码：17669 / 17677

页数：9

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