High-efficiency, high-speed VCSELs with deep oxidation layers

被引:44
作者
Chang, Y. C. [1 ]
Wang, C. S. [1 ]
Johansson, L. A. [1 ]
Coldren, L. A. [1 ]
机构
[1] Univ Calif Santa Barbara, Dept Elect & Comp Engn, Santa Barbara, CA 93106 USA
关键词
D O I
10.1049/el:20062538
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A novel method to reduce the parasitics of vertical-cavity surface-emitting lasers (VCSELs) using deep oxidation layers is proposed. Using this method, high-efficiency, high-speed 980 rim, tapered-aperture VCSELs with a -3 dB frequency of 17.9 GHz, the highest bandwidth without using proton implantation, are demonstrated.
引用
收藏
页码:1281 / 1283
页数:3
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